Wafer Etching - Various etching processes are standard
Using a novel technique, we can recycle the etchant on the tool which can then directly be re-used to process another substrate. Highly concentrated additives are employed to replenish the used up etchant thus preparing it for another run. So, the etching chemical is used at maximum efficiency, saving a significant amount of etchant costs.
Benefits: Significant decrease of processing costs and vastly reduced impact on the environment due to reduced use of chemicals and less waste.
Etching processes
- FEOL etching
- BEOL etching
- Metal etching
Main features
Etching of wafers & masks
Various etching processes of a multitude of round and squarewafers and masks are available as standard solutions.
Precise chemicals temperature control
Our new, unique solution for precise media temperature control eliminates the need for predispense before etching. Inadvertent mixing of chemicals almost becomes impossible.
Novel chrome etchant recycling
amcoss GmbH and FIMA Chem GmbH have jointly developed a turnkey solution for chrome etching. While FIMA Chem supplies the spiking chemicals, amcoss has engineered and integrated the appropriate hardware into our tools. This cooperation supports our sustainability concept and environment protection.
Using a novel technique, we can recycle the etchant on the tool which can then directly be re-used to process another substrate. Highly concentrated additives are employed to replenish the used up etchant thus preparing it for another run. So, the etching chemical is used at maximum efficiency, saving a significant amount of etchant costs.
Benefits:
Significant decrease of processing costs and vastly reduced impact on the environment due to reduced use of chemicals and less waste.