Our amcoss amr series for coating, developing, cleaning, lift-off, vapor priming, etching and heating of individual substrates is a completely modular system and perfectly adapted to the requirements of single- and small batch series production. The control unit, consisting of the control system with the ams PILOT software, may be flexibly combined according to customer needs and specific process requirements, with one or more selected processing units. Every unit holds one processing module (coater, developer, cleaner, lift-off, etcher, hot-/coolplate, vapor priming hotplate or media module). Therefore, our customers can individually compose their personal amr equipment. Depending on the wafer diameters that will have to be processed, the units will be fitted with different processing modules of varying sizes. As a consequence there are two amr types varying in size with, however, the same dimensions:

amr 200 – for wafer types 2“ to 150 mm in diameter, as well as Small Pieces
amr 300 – for wafer types 2“ to 150 mm in diameter, as well as Small Pieces

Naturally, all amr units contain the same proven processing modules as used in our amc equipment with all their sophisticated features. The only difference is wafer handling, which in contrast to the amc series does not run automatically in the amr tools. This means that the operator has to put/remove the substrates manually into/from the process modules. Processes themselves, however, will run fully automatic as usual and will be controlled and monitored by the amcoss intelligent ams PILOT software. Existing recipes may be taken from/to amcoss amc equipment.

All processing units do have the same compact and space-saving measurements (except for the control unit, which is even smaller). So, the room required can be planned easily which saves expensive production or laboratory space.