Systems for Large Substrates
n-maxx-SERIES
Engineered for performance and scalability, our n.maxx series supports substrates up to 1.300 x 1.300 mm (51 x 51 inch), offering a full spectrum of processing systems —from semiautomatic platforms for R&D to fully automated combined cluster systems for high-throughput production.
Types
Semi-automatic Systems
n-maxx C
Applications: Spin coating with CCP
n-maxx H
Applications: Hotplate, coolplate
n-maxx W
Applications: Wet cleaning, etching
Automatic Combined Cluster Systems
n-maxx
up to Ø78"
Applications:
- Spin coater
- Spray coater
- Hotplate / coolplate
- Developer
- SmartEBR
- With handling system
